Classification and standards of modular cleanrooms

Modular cleanrooms can be divided into different levels such as Class 1, Class 10, Class 100, Class 1000, Class 10000, Class 10000, Class 100000, and Class 300000. These levels are mainly based on the number of dust particles smaller than a specific particle size per cubic meter of space. For example, a Class 100 modular cleanroom controls the number of dust particles smaller than 0.5 microns per cubic meter to less than 3520. The dust-free standard currently used in chip-level production and processing has higher dust requirements than Class 100, and is mainly used in the production of some higher-level chips.
Modular cleanrooms of different levels have different application scenarios. Class 1 dust-free workshops are mainly used to manufacture integrated circuits in the microelectronics industry, requiring the precision of integrated circuits to reach the submicron level. Class 10 cleanrooms are mainly used in the semiconductor industry with a bandwidth of less than 2 microns. Class 100 cleanrooms can be used for aseptic production processes in industries such as pharmaceuticals, such as the manufacture of implants, surgery including transplantation, the manufacture of integrators, and the isolation and treatment of patients who are particularly sensitive to bacterial infections. Class 1000 cleanrooms are mainly used to produce high-quality optical products and are also used to test and assemble high-quality miniature bearings. Class 10,000 cleanrooms are used to assemble hydraulic or pneumatic equipment, and in some cases are also used in the food and beverage industry and the medical industry. Class 100,000 cleanrooms are used in many industrial fields, such as the manufacture of optical products, the manufacture of large electronic systems with smaller components, the manufacture of hydraulic or pneumatic pressure, the production of food and beverages, and the pharmaceutical industry also often uses this class of cleanrooms.
The classification standards for modular cleanrooms are mainly the US Federal 209E standard and the international ISO standard. The US Federal 209E standard specifies a space range of 1 cubic foot. Class 1, class 10, class 100, class 1000, class 1000, and class 10000 cleanrooms usually refer to the number of 0.5-micron dust particles in 1 cubic foot under this standard. The ISO standard specifies a space range of 1 cubic meter and divides the air cleanliness level into 1-9 levels. The smaller the value, the higher the cleanliness level. At present, in the actual modular cleanroom construction in my country, both the 209E standard and international ISO standard can be used, and ISO grade and 209E standards are interoperable.