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2020-11-23
Cleanliness
The cleanroom classification standards FS 209E and ISO 14644-1 require specific particle count measurements and calculations to classify the cleanliness level of a cleanroom or clean area.
ISO 14644-1
| Maximum concentration limits (particles/m3 ) | ||||||
|---|---|---|---|---|---|---|
| Classification Number (N) | 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1.0μm | 5.0μm |
| ISO Class 1 | 10 | 2 | – | – | – | – |
| ISO Class 2 | 100 | 24 | 10 | 4 | – | – |
| ISO Class 3 | 1,000 | 237 | 102 | 35.2 | 8 | – |
| ISO Class 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | – |
| ISO Class 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| ISO Class 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 83,200 | 293 |
| ISO Class 7 | – | – | – | 352,000 | 832,000 | 2,930 |
| ISO Class 8 | – | – | – | 35,200,000 | 8,320,000 | 29,300 |
| ISO Class 9 | – | – | – | – | – | 293,000 |
Federal Standard 209E Airborne Particulate Cleanliness Classes
| ICR Cleanliness | Diameter for Airborne Particle | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 0.1μm | 0.2μm | 0.3μm | 0.5μm | 0.5μm | |||||||
| Volume Units | Volume Units | Volume Units | Volume Units | Volume Units | |||||||
| SI | Class | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) | (m3) | (ft3) |
| M1 | 350 | 9.91 | 75.7 | 2.14 | 30.9 | 0.875 | 10.0 | 0.283 | – | – | |
| M1.5 | 1 | 1240 | 35.0 | 265 | 7.50 | 106 | 3.00 | 35.3 | 1.00 | – | – |
| M2 | 3,500 | 99.1 | 757 | 21.4 | 309 | 8.75 | 100 | 2.83 | – | – | |
| M2.5 | 10 | 12,400 | 350 | 2,650 | 75.0 | 1,060 | 30.0 | 353 | 10.0 | – | – |
| M3 | 35,000 | 991 | 7,570 | 214 | 3,090 | 87.5 | 1,000 | 28.3 | – | – | |
| M3.5 | 100 | – | – | 26,500 | 750 | 10.600 | 300 | 3,530 | 100 | – | – |
| M4 | – | – | 75,700 | 2,140 | 30,900 | 875 | 10,000 | 283 | – | – | |
| M4.5 | 1000 | – | – | – | – | – | – | 35,300 | 1,000 | 247 | 7.00 |
| M5 | – | – | – | – | – | – | 100,000 | 2,830 | 618 | 17.5 | |
| M5.5 | 10,000 | – | – | – | – | – | – | 353,000 | 10,000 | 2,470 | 70.0 |
| M6 | – | – | – | – | – | – | 1,000,000 | 28,300 | 6,180 | 175 | |
| M6.5 | 100,000 | – | – | – | – | – | – | 3,530,000 | 100,00 | 24,700 | 700 |
| M7 | – | – | – | – | – | – | 10,000,000 | 283,000 | 61,800 | 1,750 | |
JIS B 9920
| Class | Maximum concentration limits (particles/m3 ) | |||||
|---|---|---|---|---|---|---|
| 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1μm | 05μm | |
| Class1 | 10 | 2 | — | — | — | — |
| Class2 | 100 | 24 | 10 | 4 | — | — |
| Class3 | 100 | 237 | 102 | 35 | 8 | — |
| Class4 | 10,000 | 2,370 | 1,020 | 352 | 83 | — |
| Class5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| Class6 | — | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| Class7 | — | — | — | 352,000 | 83,200 | 2,930 |
| Class8 | — | — | — | 3,520,000 | 832,000 | 29,300 |
| Class9 | — | — | — | 35,200,000 | 8,320,000 | 293,000 |
Worldwide Standard comparison
| Worldwide Standard | Class | |||||
|---|---|---|---|---|---|---|
| ISO 14644-1 | ISO 3 | ISO 4 | ISO 5 | ISO 6 | ISO 7 | ISO 8 |
| FS 209E | Class 1 | Class 10 | Class 100 | Class 1000 | Class 10000 | Class 100000 |
| FS 209E(SI) | M1.5 | M2.5 | M3.5 | M4.5 | M5.5 | M6.5 |
| JIS B 9920 | Class 3 | Class 4 | Class 5 | Class 6 | Class 7 | Class 8 |
| Britain BS 5295 | C | D | E/F | G/H | J | K |
| Germany VD I.2083 | 1C | 2 | 3 | 4 | 5 | 6 |
| Australia AS 1386 | 0.035 | 0.35 | 3.5 | 35 | 350 | 3500 |
| France AFNOR X44101 | — | — | 4,000 | — | 4,000 | 4,000,000 |
| Grade | – | A/B | – | C | ||
